Transition characteristics to Arc Discharge of KrF Excimer-Laser Pumping Discharge

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Fast - Discharge - Initiated KrF Laser

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ژورنال

عنوان ژورنال: IEEJ Transactions on Fundamentals and Materials

سال: 1996

ISSN: 0385-4205,1347-5533

DOI: 10.1541/ieejfms1990.116.8_705